(Видавництво Львівської політехніки, 2020-02-24) Manske, Eberhard; Jäger, Gerd; Mastylo, Rostyslav; Dontsov, Denis; Technische Universität Ilmenau; SIOS Meßtechnik GmbH
In micro- and nanotechnology, the demands placed on measurement technology are increasing. The structures to
be measured are becoming more complex with smaller structure widths, increasingly larger surface regions, and thousands of
inspection features. To solve the problems, it has become desirable and even necessary to combine multi-sensor technology with
high precision nanopositioning and nanomeasuring technology. The Nanopositioning and Nanomeasuring Machine NMM-1 with a
measuring range of 25 mm × 25 mm × 5 mm and sub-nanometer resolution allow the application of several optical, tactile and
atomic force probes. The combination of several sensor technologies in a multi-sensor approach for application with the NMM-1 is demonstrated.