(Видавництво Львівської політехніки, 2010) Teslyuk, Vasyl; Kernytskyy, Andriy; Denysyuk, Pavlo; Hamza, Ali Yousef Alshawabkeh
Models for MEMS structures analysis based on stochastic Petri nets are designed. Results of analysis are presented and features of developed software for information technology of analysis and synthesis of micro electro-mechanical systems are described.
