Manske, EberhardJäger, GerdMastylo, RostyslavDontsov, Denis2021-01-212021-01-212020-02-242020-02-24Nanopositioning and nanomeasuring machine for multi-sensor applications / Eberhard Manske, Gerd Jäger, Rostyslav Mastylo, Denis Dontsov // Measuring Equipment and Metrology. — Lviv : Lviv Politechnic Publishing House, 2020. — Vol 81. — No 2. — P. 17–24.https://ena.lpnu.ua/handle/ntb/55958In micro- and nanotechnology, the demands placed on measurement technology are increasing. The structures to be measured are becoming more complex with smaller structure widths, increasingly larger surface regions, and thousands of inspection features. To solve the problems, it has become desirable and even necessary to combine multi-sensor technology with high precision nanopositioning and nanomeasuring technology. The Nanopositioning and Nanomeasuring Machine NMM-1 with a measuring range of 25 mm × 25 mm × 5 mm and sub-nanometer resolution allow the application of several optical, tactile and atomic force probes. The combination of several sensor technologies in a multi-sensor approach for application with the NMM-1 is demonstrated.17-24enNanopositioning and Nanomeasuring Machinemulti-sensor technologyProbeNanotechnologyArticle© Національний університет “Львівська політехніка”, 20208doi.org/10.23939/istcmtm2020.02.017Nanopositioning and nanomeasuring machine for multi-sensor applications / Eberhard Manske, Gerd Jäger, Rostyslav Mastylo, Denis Dontsov // Measuring Equipment and Metrology. — Lviv : Lviv Politechnic Publishing House, 2020. — Vol 81. — No 2. — P. 17–24.