Blumröder UlrikeFüßl RonaldFröhlich ThomasManske EberhardMastylo Rostyslav2022-11-082022-11-082021Frequency comb-coupled metrology lasers for nanopositioning and nanomeasuring machines / Ulrike Blumröder, Ronald Füßl, Thomas Fröhlich, Eberhard Manske, Rostyslav Mastylo // Measuring Equipment and Metrology : scientific journal. – Lviv : Lviv Politechnic Publishing House, 2021. – Volume 82, № 4. – Р. 36–43. – Bibliography: 24 titles.https://ena.lpnu.ua/handle/ntb/57040This article shows how a direct readout of the interferometric length measurement in nanopositioning machines can be transferred by connecting the metrology laser to a frequency comb line. The approach is based on a GPS-referenced frequency comb with which the stability of the timer (atomic clock via GPS) is transferred to the metrology laser of the nanopositioning and nanomeasuring machine NPMM-200. The necessary prerequisites for ensuring traceability are discussed. It is demonstrated that with this approach an improvement in the long-term stability of the metrology laser by three orders of magnitude can be achieved.enInterferometric length measurementNanopositioning and nanomeasuring machineMetrology laserFrequency combArticle