Teslyuk, V.Karkulyovskyy, V.Lobur, M.Pereyma, M.Denysyuk, P.2015-01-262015-01-262006Methods and models for computer aided MEMS design / V. Tesluk, M. Lobur, M. Pereyma, P. Denysyuk, V. Karkulyovskyy // Computer science and information technologies : proceedings of the international conference (September 28th-30th, Lviv, Ukraine) / Lviv Polytechnic National University, Institute of Computer Science and Information Technologies. – Lviv, 2006. – P. 19–25. – Bibliography: 25 titles.https://ena.lpnu.ua/handle/ntb/26108In this paper an analysis of MEMS design features has been conducted. At the basis of that analysis an implementation of algorithmic aspect in MEMS design is proposed.enmicroelectronicsMEMSCADArticle