Browsing by Author "Kushnir, Yurij"
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Item Model of a piezoelectric microaccelerometer based on two piezoelectric plates separated by a layer of polysilicon(Видавництво Львівської політехніки, 2010) Kushnir, Yurij; Lobur, MykhayloThis paper presents an alternative design solution for a piezoelectric sensor based on two plates separated by a polysilicon solid body.