Browsing by Author "Manske, Eberhard"

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    Nanopositioning and nanomeasuring machine for multi-sensor applications
    (Видавництво Львівської політехніки, 2020-02-24) Manske, Eberhard; Jäger, Gerd; Mastylo, Rostyslav; Dontsov, Denis; Technische Universität Ilmenau; SIOS Meßtechnik GmbH
    In micro- and nanotechnology, the demands placed on measurement technology are increasing. The structures to be measured are becoming more complex with smaller structure widths, increasingly larger surface regions, and thousands of inspection features. To solve the problems, it has become desirable and even necessary to combine multi-sensor technology with high precision nanopositioning and nanomeasuring technology. The Nanopositioning and Nanomeasuring Machine NMM-1 with a measuring range of 25 mm × 25 mm × 5 mm and sub-nanometer resolution allow the application of several optical, tactile and atomic force probes. The combination of several sensor technologies in a multi-sensor approach for application with the NMM-1 is demonstrated.
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    State and prospects of computerized systems monitoring the topology of surfaces, based on white light іnterferomertry
    (Publishing House of Lviv Polytechnic National University, 2014) Stadnyk, Bohdan; Manske, Eberhard; Khoma, Anna
    This paper describes a computerized system for object topology control based on a white light interferometer. The theoretical fundamentals of white light interferometry and mathematical model of an interferogram are presented. An overview and comparative analysis of methods for the reconstruction of the topology of surfaces based on a white light interferogram are performed, their main advantages and disadvantages are defined, and the objectives for the development of computerized systems are formulated. Описано комп’ютеризовану систему контролю топології об’єкта на базі інтерферометра білого світла. Подано основні теоретичні відомості оптичної інтерферометри та наведено математичну модель інтерферограми. Проведено огляд та порівняльний аналіз методів реконструкції топології поверхні із інтерферограми білого світла, визначено їх основні переваги та недоліки, а також сформульовано завдання щодо розвитку комп’ютеризованих систем.