Nanopositioning and nanomeasuring machine for multi-sensor applications
Date
2020-02-24
Journal Title
Journal ISSN
Volume Title
Publisher
Видавництво Львівської політехніки
Lviv Politechnic Publishing House
Lviv Politechnic Publishing House
Abstract
In micro- and nanotechnology, the demands placed on measurement technology are increasing. The structures to
be measured are becoming more complex with smaller structure widths, increasingly larger surface regions, and thousands of
inspection features. To solve the problems, it has become desirable and even necessary to combine multi-sensor technology with
high precision nanopositioning and nanomeasuring technology. The Nanopositioning and Nanomeasuring Machine NMM-1 with a
measuring range of 25 mm × 25 mm × 5 mm and sub-nanometer resolution allow the application of several optical, tactile and
atomic force probes. The combination of several sensor technologies in a multi-sensor approach for application with the NMM-1 is demonstrated.
Description
Keywords
Nanopositioning and Nanomeasuring Machine, multi-sensor technology, Probe, Nanotechnology
Citation
Nanopositioning and nanomeasuring machine for multi-sensor applications / Eberhard Manske, Gerd Jäger, Rostyslav Mastylo, Denis Dontsov // Measuring Equipment and Metrology. — Lviv : Lviv Politechnic Publishing House, 2020. — Vol 81. — No 2. — P. 17–24.