Browsing by Author "Orlov, Anatoliy"
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Item Nanotechnology and nanoscaled materials for microsystems application(Видавництво Львівської політехніки, 2010) Mladlenov, Georgiy; Koleva, Elena; Yakymenko, Yuriy; Spivak, Viktor; Bogdan, Oleksandr; Orlov, Anatoliystages of formation and some perspective aspects of nanotechnology development, in particular, nanoelectronics, getting nanomaterials and microsystems device is analyzed in this report.