Research of volt-ampere characteristics of the wire pierce electron gun at electron-beam microprocessing of dielectrics
Date
2018-01-29
Journal Title
Journal ISSN
Volume Title
Publisher
Lviv Politechnic Publishing House
Abstract
The article considers the basic energy characteristics of a wire Pierce electron-beam
gun, which used for microprocessing of dielectric materials in vacuo. The aim of the work is to
determine the optimal regimes of electron-beam microprocessing of dielectric materials by studying
the volt-ampere characteristics of the wire Pierce electron-beam gun. In the methodical part of the
scientific work, a technological experiment with electron-beam microprocessing of dielectric
surfaces is proposed, and also identified and studied the operating modes of the Pierce electron-beam
gun in depending on their energy characteristics. As a result, the analysis of the obtained results of
electron-beam microprocessing of surfaces of dielectric materials makes it possible to increase the
reproducibility of the results of such treatment in terms of purity and residual nanorelief by
18–25 %. The comparison of the results of experimental electron-beam microprocessing of
dielectrics with the results of their laser processing made it possible to establish a decrease in the
residual microroughness of the surface of the optical glass K8 by 17...27 times with electron-beam
microprocessing and by 12–14 times with surface laser treatment. Wherein, surface laser processing
does not allow to eliminate the undulation of the surface, which is related to the specificity of the
interaction of the laser beam with the surface of the optical material, whereas, when processing by
the ribbon-shaped electronic stream such undulation does not appear. Conclusions and analyzed data
obtained in the article based on the results of experimental studies can be used to optimize the
technological regimes of electron-beam microprocessing in the production of micro-optics products,
integrated optics, microelectrooptics, nanoelectronics, etc.
Description
Keywords
electron-beam microprocessing, Pierce electron gun, volt-ampere characteristics, micro-optics products, dielectric materials, atomic-force microscopy
Citation
Research of volt-ampere characteristics of the wire pierce electron gun at electron-beam microprocessing of dielectrics / Maksym Bondarenko, Viktor Antonyuk, Yurii Kovalenko, Maksym Rud, Roman Haidash // Ukrainian Journal of Mechanical Engineering and Materials Science. — Lviv : Lviv Politechnic Publishing House, 2018. — Vol 4. — No 1. — P. 58–64.