Methods and models for computer aided MEMS design
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Date
2006
Journal Title
Journal ISSN
Volume Title
Publisher
Українські технології
Abstract
In this paper an analysis of MEMS design features has been conducted. At the basis of that analysis an implementation of algorithmic aspect in MEMS design is proposed.
Description
Keywords
microelectronics, MEMS, CAD
Citation
Methods and models for computer aided MEMS design / V. Tesluk, M. Lobur, M. Pereyma, P. Denysyuk, V. Karkulyovskyy // Computer science and information technologies : proceedings of the international conference (September 28th-30th, Lviv, Ukraine) / Lviv Polytechnic National University, Institute of Computer Science and Information Technologies. – Lviv, 2006. – P. 19–25. – Bibliography: 25 titles.