Browsing by Author "Berezhansky, Volodymyr"
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Item New approach for modeling processes of doping redistribution during oxidization(Видавництво Львівської політехніки, 2012) Berezhansky, VolodymyrRedistribution of doping during diffusive-oxidizing processes is simulated. The optimal technological conditions of diffusive oxidizing processes is determined.Item Special feature of forming solid planar diffusion a source for submicron structure(Видавництво Львівської політехніки, 2010) Berezhansky, VolodymyrSolid planar diffusion a source for forming submicron structure VLSI are given in this paper.