Вимірювальна техніка та метрологія. – 2020. – Випуск 81, №2

Науковий журнал

Входить до наукометричних баз Index Copernicus, CrossRef (DOI)

Measuring Equipment and Metrology : scientific journal. – Lviv : Lviv Politechnic Publishing House, 2020. – Volume 81, № 2. – 44 р.

Вимірювальна техніка та метрологія

Зміст

1. Титульний аркуш до “Вимірювальна техніка та метрологія”	1
2. Rak V., Yatsyshyn S., Baitsar R. Optoelectronic quartz sensor of force and pressure	3
3. Midyk A., Lysa O. Studies of temperature-humidity characteristics of the greenhouse cyber-physical system	7
4. Ishchenko L., Baran M. Emulator for adjusting and improving the management program of multitasks of AFC/PFC analyzer Clarke Hess 250	13
5. Manske E., Jäger G., Mastylo R., Dontsov D. Nanopositioning and nanomeasuring machine for multi-sensor applications	17
6. Yatsyshyn S., Lazarenko S., Lazarenko N. Metrological support of gamma-ray measurements in Ukraine	25
7. Sydorko I., Baitsar R. Risk management in the clinic – diagnostic laboratories	30
8. Tchaban V. Dynamics of motion of electron in electrical field	39
9. Content	43

Content (Vol. 81, No 2)

1. Tytulnyi arkush do "Vymiriuvalna tekhnika ta metrolohiia"	1
2. Rak V., Yatsyshyn S., Baitsar R. Optoelectronic quartz sensor of force and pressure	3
3. Midyk A., Lysa O. Studies of temperature-humidity characteristics of the greenhouse cyber-physical system	7
4. Ishchenko L., Baran M. Emulator for adjusting and improving the management program of multitasks of AFC/PFC analyzer Clarke Hess 250	13
5. Manske E., Jäger G., Mastylo R., Dontsov D. Nanopositioning and nanomeasuring machine for multi-sensor applications	17
6. Yatsyshyn S., Lazarenko S., Lazarenko N. Metrological support of gamma-ray measurements in Ukraine	25
7. Sydorko I., Baitsar R. Risk management in the clinic – diagnostic laboratories	30
8. Tchaban V. Dynamics of motion of electron in electrical field	39
9. Content	43

Browse

Now showing 1 - 1 of 1

Nanopositioning and nanomeasuring machine for multi-sensor applications
(Видавництво Львівської політехніки, 2020-02-24) Manske, Eberhard; Jäger, Gerd; Mastylo, Rostyslav; Dontsov, Denis; Technische Universität Ilmenau; SIOS Meßtechnik GmbH
In micro- and nanotechnology, the demands placed on measurement technology are increasing. The structures to be measured are becoming more complex with smaller structure widths, increasingly larger surface regions, and thousands of inspection features. To solve the problems, it has become desirable and even necessary to combine multi-sensor technology with high precision nanopositioning and nanomeasuring technology. The Nanopositioning and Nanomeasuring Machine NMM-1 with a measuring range of 25 mm × 25 mm × 5 mm and sub-nanometer resolution allow the application of several optical, tactile and atomic force probes. The combination of several sensor technologies in a multi-sensor approach for application with the NMM-1 is demonstrated.