Optical Properties of Epitaxial ZnO-ALD Films Implanted with Rare Earth

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Optical Properties of Epitaxial ZnO-ALD Films Implanted with Rare Earth / E. Guziewicz, R. Ratajczak, M. Stachowicz, T. A. Krajewski, D. Snigurenko, A. Turos // Oxide Materials for Electronic Engineering – fabrication, properties and applications : book of abstracts international conference, May 29–June 2, 2017 Lviv, Ukraine. — Lviv, 2017. — P. 162. — (5 materials for quantum and optoelectronics and detectors of radiation).