The Effect of Deposition Temperature, Flux of N2 and Sputtering Power on Si/SiO/NbN Superconducting Thin Films
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The Effect of Deposition Temperature, Flux of N2 and Sputtering Power on Si/SiO/NbN Superconducting Thin Films / A. Altinkok, Y. Takamura, Rafael S. Goncalves, Renan P. Loreto, Juan P. Cascales, H. Zenk, Jagadeesh S. Moodera // Oxide Materials
for Electronic Engineering –
fabrication, properties
and applications : book
of abstracts international conference, May 29–June 2, 2017
Lviv, Ukraine. — Lviv, 2017. — P. 40. — (1 technology of active media for electronic engineering).