Nanopositioning and nanomeasuring machine for multi-sensor applications

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dc.citation.epage24
dc.citation.issue2
dc.citation.journalTitleВимірювальна техніка та метрологія
dc.citation.spage17
dc.contributor.affiliationTechnische Universität Ilmenau
dc.contributor.affiliationSIOS Meßtechnik GmbH
dc.contributor.authorManske, Eberhard
dc.contributor.authorJäger, Gerd
dc.contributor.authorMastylo, Rostyslav
dc.contributor.authorDontsov, Denis
dc.coverage.placenameЛьвів
dc.coverage.placenameLviv
dc.date.accessioned2021-01-21T08:54:34Z
dc.date.available2021-01-21T08:54:34Z
dc.date.created2020-02-24
dc.date.issued2020-02-24
dc.description.abstractIn micro- and nanotechnology, the demands placed on measurement technology are increasing. The structures to be measured are becoming more complex with smaller structure widths, increasingly larger surface regions, and thousands of inspection features. To solve the problems, it has become desirable and even necessary to combine multi-sensor technology with high precision nanopositioning and nanomeasuring technology. The Nanopositioning and Nanomeasuring Machine NMM-1 with a measuring range of 25 mm × 25 mm × 5 mm and sub-nanometer resolution allow the application of several optical, tactile and atomic force probes. The combination of several sensor technologies in a multi-sensor approach for application with the NMM-1 is demonstrated.
dc.format.extent17-24
dc.format.pages8
dc.identifier.citationNanopositioning and nanomeasuring machine for multi-sensor applications / Eberhard Manske, Gerd Jäger, Rostyslav Mastylo, Denis Dontsov // Measuring Equipment and Metrology. — Lviv : Lviv Politechnic Publishing House, 2020. — Vol 81. — No 2. — P. 17–24.
dc.identifier.citationenNanopositioning and nanomeasuring machine for multi-sensor applications / Eberhard Manske, Gerd Jäger, Rostyslav Mastylo, Denis Dontsov // Measuring Equipment and Metrology. — Lviv : Lviv Politechnic Publishing House, 2020. — Vol 81. — No 2. — P. 17–24.
dc.identifier.doidoi.org/10.23939/istcmtm2020.02.017
dc.identifier.urihttps://ena.lpnu.ua/handle/ntb/55958
dc.language.isoen
dc.publisherВидавництво Львівської політехніки
dc.publisherLviv Politechnic Publishing House
dc.relation.ispartofВимірювальна техніка та метрологія, 2 (81), 2020
dc.relation.ispartofMeasuring Equipment and Metrology, 2 (81), 2020
dc.relation.references[1] International Technology Roadmap for Semiconductors, 2009. [Online] Available: http://www.itrs.net/Links /2009ITRS /2009Chapters_2009Tables/2009_Metrology.pdf)
dc.relation.references[2] G. Jäger, E. Manske, T. Hausotte, H.-J. Büchner, “The metrological basis and operation of nanopositioning and nanomeasuring machine NMM-1”, Tech. Mess., Vol. 76, No. 5, 2009, pp. 227–234.
dc.relation.references[3] E. Manske, T. Hausotte, R. Mastylo, T. Machleidt, K.-H. Franke and G. Jäger, “New applications of the nanopositioning and nanomeasuring machine by using advanced tactile and non-tactile probes”, Meas. Sci. Technol., Vol. 18, No. 2, 2007, pp. 520–527.
dc.relation.references[4] T. Machleidt, E. S., D. Kapusi, and K.a-H. Franke, “Depth From Focus (DFF) Utilizing the Large Measuring Volume of a Nanopositioning and Nanomeasuring Machine”, Proc. Sensoren und Messsysteme, Nürnberg, Germany, pp. 478–481, May 2010.
dc.relation.references[5] T. Machleidt, E. Sparrer, N. Dorozhovets, E. Manske, K.-H. Franke, and D. Kapusi, “Navigation in a Large Measurement Volume by Using AFM Technology as a Sensor System in the NPMM”, Tech. Mess., Vol. 76, No. 5, 2009, pp. 274–277.
dc.relation.references[6] S. Buetefisch, G. Dai, H.-U. Danzebrink, L. Koenders, F. Solzbacher, and M.P. Orthner, “Novel design for an ultra high precision 3D micro probe for CMM applications”, Proc. Eurosensors XXIV, September 5–8, 2010, Linz, Austria, Vol. 5, 2010, pp. 705–712.
dc.relation.references[7] M. Ritter, T. Dziomba, A. Kranzmann, and L. Koenders, “A landmark-based 3D calibration strategy for SPM”, Meas. Sience Techn., Vol. 18, 2007, pp. 404–414.
dc.relation.references[8] E.Manske, G. Jäger, T. Hausotte, and T. Machleidt, “Multisensor technology based on a laser focus probe for nanomeasuring applications over large areas”, In Proc. of the SPIE – The Internat. Soc. for Opt. Eng., Vol. 8082, 2011, pp.: 808203 (9 pp.).
dc.relation.referencesen[1] International Technology Roadmap for Semiconductors, 2009. [Online] Available: http://www.itrs.net/Links /2009ITRS /2009Chapters_2009Tables/2009_Metrology.pdf)
dc.relation.referencesen[2] G. Jäger, E. Manske, T. Hausotte, H.-J. Büchner, "The metrological basis and operation of nanopositioning and nanomeasuring machine NMM-1", Tech. Mess., Vol. 76, No. 5, 2009, pp. 227–234.
dc.relation.referencesen[3] E. Manske, T. Hausotte, R. Mastylo, T. Machleidt, K.-H. Franke and G. Jäger, "New applications of the nanopositioning and nanomeasuring machine by using advanced tactile and non-tactile probes", Meas. Sci. Technol., Vol. 18, No. 2, 2007, pp. 520–527.
dc.relation.referencesen[4] T. Machleidt, E. S., D. Kapusi, and K.a-H. Franke, "Depth From Focus (DFF) Utilizing the Large Measuring Volume of a Nanopositioning and Nanomeasuring Machine", Proc. Sensoren und Messsysteme, Nürnberg, Germany, pp. 478–481, May 2010.
dc.relation.referencesen[5] T. Machleidt, E. Sparrer, N. Dorozhovets, E. Manske, K.-H. Franke, and D. Kapusi, "Navigation in a Large Measurement Volume by Using AFM Technology as a Sensor System in the NPMM", Tech. Mess., Vol. 76, No. 5, 2009, pp. 274–277.
dc.relation.referencesen[6] S. Buetefisch, G. Dai, H.-U. Danzebrink, L. Koenders, F. Solzbacher, and M.P. Orthner, "Novel design for an ultra high precision 3D micro probe for CMM applications", Proc. Eurosensors XXIV, September 5–8, 2010, Linz, Austria, Vol. 5, 2010, pp. 705–712.
dc.relation.referencesen[7] M. Ritter, T. Dziomba, A. Kranzmann, and L. Koenders, "A landmark-based 3D calibration strategy for SPM", Meas. Sience Techn., Vol. 18, 2007, pp. 404–414.
dc.relation.referencesen[8] E.Manske, G. Jäger, T. Hausotte, and T. Machleidt, "Multisensor technology based on a laser focus probe for nanomeasuring applications over large areas", In Proc. of the SPIE – The Internat. Soc. for Opt. Eng., Vol. 8082, 2011, pp., 808203 (9 pp.).
dc.relation.urihttp://www.itrs.net/Links
dc.rights.holder© Національний університет “Львівська політехніка”, 2020
dc.subjectNanopositioning and Nanomeasuring Machine
dc.subjectmulti-sensor technology
dc.subjectProbe
dc.subjectNanotechnology
dc.titleNanopositioning and nanomeasuring machine for multi-sensor applications
dc.typeArticle

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Вимірювальна техніка та метрологія. – 2020. – Випуск 81, №2