Analysis of piezoresistors arrangements on the surface of circular membrane in pressure sensors

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2004

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Видавництво Національного університету "Львівська політехніка"

Abstract

A theoretical analysis concerning metrological properties of thick film piezoresistors placed on circular edge-clamped membrane is described. The change of resistance of a thick film piezoresistor, caused by the deflection of the membrane, related to the distance from the membrane centre and the width of the piezoresistor, is evaluated. Analytical expressions for different piezoresistors arrangements are presented and discussed.

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Majewski J. Analysis of piezoresistors arrangements on the surface of circular membrane in pressure sensors / J. Majewski // Вісник Національного університету «Львівська політехніка». – 2004. – № 510 : Елементи теорії та прилади твердотілої електроніки. – С. 44–50. – Bibliography: 2 titles.

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