Survey of quality and reliability problems in design of MEMS

Abstract

The interdisciplinary nature of MicroElectroMechanical Systems (MEMS) utilizes design engineering and manufacturing expertise from a wide and diverse range of technical areas. In order to produce a high reliability and quality MEMS we must not only examine the device itself, but must also examine the entire process surrounding the devices, from conception to finish. This means that the process must be qualified, with the supplier fully investigated, the design verified, and the packaging certified. The paper presents a survey of the various aspects of MEMS, with emphasis on its reliability and quality features in the design phase.