The analysis of technologycal methods for preparation of reflecting grading for devices based on surface acoustic waves

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dc.citation.journalTitleЕлементи теорії та прилади твердотілої електроніки
dc.contributor.affiliationLviv Radiotechnical Research Instituteuk_UA
dc.contributor.affiliationLviv Polytechnic National Universityuk_UA
dc.contributor.authorSmerklo, Lubomyr
dc.contributor.authorShkoropad, Vasyl
dc.contributor.authorZubkov, Anatolij
dc.contributor.authorKuchmij, Galyna
dc.coverage.countryUAuk_UA
dc.coverage.placenameЛьвівuk_UA
dc.date.accessioned2018-08-28T14:43:31Z
dc.date.available2018-08-28T14:43:31Z
dc.date.issued2002
dc.description.abstractThe formation methods for reflecting grooves with vertical walls and depth of up to 7 are analyzed and optimized at the paper.uk_UA
dc.format.pages176–179
dc.identifier.citationThe analysis of technologycal methods for preparation of reflecting grading for devices based on surface acoustic waves / L. Smerklo, V. Shkoropad, A. Zubkov, G. Kuchmij // Вісник Національного університету "Львівська політехніка". – 2002. – № 458 : Елементи теорії та прилади твердотілої електроніки. – С. 176–179. – Bibliography: 3 titles.uk_UA
dc.identifier.urihttps://ena.lpnu.ua/handle/ntb/42539
dc.language.isoenuk_UA
dc.publisherВидавництво Національного університету "Львівська політехніка"uk_UA
dc.relation.references1. L. Smerklo, V. Shkoropad, G. Kuchmij Filters based on surface acoustic waves for UHF range // Journal of Lviv Polytechnic National University, Radioelectronics and telecommunications, No.387, 2000, pp.-346-354 (in Ukrainian). 2. Filters on surface acoustic waves: Calculations, technology and applications / Edited by Matthews, 1981, 471 p. 3. Z. Hotra, S. Lukojanov, L. Smerklo Laser-stimulated etching in IC technology // Foreign electronic equipment, 1986, No.6, pp. 3-55 (in Russian).uk_UA
dc.rights.holder© Lubomyr Smerklo, Vasyl Shkoropad, Anatolij Zubkov, Galyna Kuchmij, 2002uk_UA
dc.subjectreflecting gradinguk_UA
dc.subjectsurface acoustic waveuk_UA
dc.subjecttechnologyuk_UA
dc.titleThe analysis of technologycal methods for preparation of reflecting grading for devices based on surface acoustic wavesuk_UA
dc.typeArticleuk_UA

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Елементи теорії та прилади твердотілої електроніки. – 2002. – №458